JPH0217477Y2 - - Google Patents

Info

Publication number
JPH0217477Y2
JPH0217477Y2 JP1984168143U JP16814384U JPH0217477Y2 JP H0217477 Y2 JPH0217477 Y2 JP H0217477Y2 JP 1984168143 U JP1984168143 U JP 1984168143U JP 16814384 U JP16814384 U JP 16814384U JP H0217477 Y2 JPH0217477 Y2 JP H0217477Y2
Authority
JP
Japan
Prior art keywords
etching
processing liquid
processing
constant temperature
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984168143U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6183033U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984168143U priority Critical patent/JPH0217477Y2/ja
Publication of JPS6183033U publication Critical patent/JPS6183033U/ja
Application granted granted Critical
Publication of JPH0217477Y2 publication Critical patent/JPH0217477Y2/ja
Expired legal-status Critical Current

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  • Weting (AREA)
JP1984168143U 1984-11-06 1984-11-06 Expired JPH0217477Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984168143U JPH0217477Y2 (en]) 1984-11-06 1984-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984168143U JPH0217477Y2 (en]) 1984-11-06 1984-11-06

Publications (2)

Publication Number Publication Date
JPS6183033U JPS6183033U (en]) 1986-06-02
JPH0217477Y2 true JPH0217477Y2 (en]) 1990-05-16

Family

ID=30725923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984168143U Expired JPH0217477Y2 (en]) 1984-11-06 1984-11-06

Country Status (1)

Country Link
JP (1) JPH0217477Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123730A (ja) * 1982-01-18 1983-07-23 Toshiba Corp 半導体ウエハ−エツチング装置
JPS5943523A (ja) * 1982-09-03 1984-03-10 Yamagata Nippon Denki Kk 半導体エツチング処理における薬液供給方法

Also Published As

Publication number Publication date
JPS6183033U (en]) 1986-06-02

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